Semiconducter Wafers with Non-Contact Inspection Capabilities

This patent portfolio, assigned to M3 Corporation, covers a wafer inspection method, and is available for sale through IPApproach.

Foreign Counterparts

1

Assignee

M3 Corporation

Availability

For Sale

Patents Included

• JP 7495764 B1

Technology Highlights

• The invention performs a self-inspection by self-generating power such as solar power, and automatically transmits the inspection results.
• The invention provides a semiconductor wafer equipped with the non-contact inspection function.
• The invention inspects the pass/fail state of each chip in the wafer without utilizing a tester system or direct contact inspection using a probe card connected to a tester.
• The invention does not consider the limits of electrical characteristics such as S parameters inside the probe card. Hence, the frequency of the external terminals of the chips on the wafer is not restricted by the electrical characteristics of the probe card.
• The invention does not require a large measuring device such as tester connected to the probe card i.e. it eliminates the need to install them.
• The invention does not require a large-scale inspection system. Hence, it reduces carbon dioxide emissions generated during the manufacturing process of a large-scale manufacturing system.
• The invention reduces the cost required for inspection and the inspection time.

Overview

The technology disclosed provides the following advantages:

Listing updated August 21, 2026

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